Post-fabrication frequency trimming of coplanar-waveguide resonators in circuit QED quantum processors

S. Vallés-Sanclemente; S. L.M. van der Meer; M. Finkel; N. Muthusubramanian; M. Beekman; H. Ali; J. F. Marques; C. Zachariadis; H. M. Veen; T. Stavenga; N. Haider; L. DiCarlo

doi:10.1063/5.0148222

Post-fabrication frequency trimming of coplanar-waveguide resonators in circuit QED quantum processors

S. Vallés-Sanclemente, S. L.M. van der Meer, M. Finkel, N. Muthusubramanian, M. Beekman, H. Ali, J. F. Marques, C. Zachariadis, H. M. Veen, T. Stavenga, N. Haider, L. DiCarlo^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › Scientific › peer-review

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Abstract

We present the use of a set of airbridges to trim the frequency of microwave coplanar-waveguide (CPW) resonators post-fabrication. This method is compatible with the fabrication steps of conventional CPW airbridges and crossovers and increases device yield by allowing compensation of design and fabrication uncertainty with 100 MHz range and 10 MHz resolution. We showcase two applications in circuit QED. The first is the elimination of frequency collisions between resonators intended to readout different transmons by frequency-division multiplexing. The second is frequency matching of readout and Purcell-filter resonator pairs. Combining this matching with transmon frequency trimming by laser annealing reliably achieves fast and high-fidelity readout across 17-transmon quantum processors.

Original language	English
Article number	034004
Number of pages	5
Journal	Applied Physics Letters
Volume	123
Issue number	3
DOIs	https://doi.org/10.1063/5.0148222
Publication status	Published - 2023

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034004_1_5.0148222Final published version, 1.88 MBLicence: CC BY

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Vallés-Sanclemente, S., van der Meer, S. L. M., Finkel, M., Muthusubramanian, N., Beekman, M., Ali, H., Marques, J. F., Zachariadis, C., Veen, H. M., Stavenga, T., Haider, N., & DiCarlo, L. (2023). Post-fabrication frequency trimming of coplanar-waveguide resonators in circuit QED quantum processors. Applied Physics Letters, 123(3), Article 034004. https://doi.org/10.1063/5.0148222

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abstract = "We present the use of a set of airbridges to trim the frequency of microwave coplanar-waveguide (CPW) resonators post-fabrication. This method is compatible with the fabrication steps of conventional CPW airbridges and crossovers and increases device yield by allowing compensation of design and fabrication uncertainty with 100 MHz range and 10 MHz resolution. We showcase two applications in circuit QED. The first is the elimination of frequency collisions between resonators intended to readout different transmons by frequency-division multiplexing. The second is frequency matching of readout and Purcell-filter resonator pairs. Combining this matching with transmon frequency trimming by laser annealing reliably achieves fast and high-fidelity readout across 17-transmon quantum processors.",

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AU - Vallés-Sanclemente, S.

AU - van der Meer, S. L.M.

AU - Finkel, M.

AU - Muthusubramanian, N.

AU - Beekman, M.

AU - Ali, H.

AU - Marques, J. F.

AU - Zachariadis, C.

AU - Veen, H. M.

AU - Stavenga, T.

AU - Haider, N.

AU - DiCarlo, L.

PY - 2023

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AB - We present the use of a set of airbridges to trim the frequency of microwave coplanar-waveguide (CPW) resonators post-fabrication. This method is compatible with the fabrication steps of conventional CPW airbridges and crossovers and increases device yield by allowing compensation of design and fabrication uncertainty with 100 MHz range and 10 MHz resolution. We showcase two applications in circuit QED. The first is the elimination of frequency collisions between resonators intended to readout different transmons by frequency-division multiplexing. The second is frequency matching of readout and Purcell-filter resonator pairs. Combining this matching with transmon frequency trimming by laser annealing reliably achieves fast and high-fidelity readout across 17-transmon quantum processors.

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Post-fabrication frequency trimming of coplanar-waveguide resonators in circuit QED quantum processors

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