Post-processing modules in IC-compatible microsystem fabrication

DDL Wijngaards, RF Wolffenbuttel

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationProceedings
Editors RF Wolffenbuttel, DDL Wijngaards, van CJ Mullem
Place of PublicationS.l.
Publishers.n.
Pages41-58
Number of pages18
ISBN (Print)90-9014166-9
Publication statusPublished - 2000
EventSymposium on Microtechnology in Metrology and Metrology in Microsystems, Delft - S.l.
Duration: 31 Aug 20001 Sep 2000

Publication series

Name
PublisherS.n.

Conference

ConferenceSymposium on Microtechnology in Metrology and Metrology in Microsystems, Delft
Period31/08/001/09/00

Keywords

  • ZX Int.klas.verslagjaar < 2002

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