Post-processing modules in IC-compatible microsystem fabrication

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings
Editors	RF Wolffenbuttel, DDL Wijngaards, van CJ Mullem
Place of Publication	S.l.
Publisher	s.n.
Pages	41-58
Number of pages	18
ISBN (Print)	90-9014166-9
Publication status	Published - 2000
Event	Symposium on Microtechnology in Metrology and Metrology in Microsystems, Delft - S.l. Duration: 31 Aug 2000 → 1 Sept 2000

Name
Publisher	S.n.

Conference	Symposium on Microtechnology in Metrology and Metrology in Microsystems, Delft
Period	31/08/00 → 1/09/00

Keywords

@inproceedings{694ac7e8da904d55a2a01909d0eef5c0,

title = "Post-processing modules in IC-compatible microsystem fabrication",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "DDL Wijngaards and RF Wolffenbuttel",

year = "2000",

language = "Undefined/Unknown",

isbn = "90-9014166-9",

publisher = "s.n.",

pages = "41--58",

editor = "{RF Wolffenbuttel} and {DDL Wijngaards} and {CJ Mullem}, van",

booktitle = "Proceedings",

note = "Symposium on Microtechnology in Metrology and Metrology in Microsystems, Delft ; Conference date: 31-08-2000 Through 01-09-2000",

}

TY - GEN

T1 - Post-processing modules in IC-compatible microsystem fabrication

AU - Wijngaards, DDL

AU - Wolffenbuttel, RF

PY - 2000

Y1 - 2000

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 90-9014166-9

SP - 41

EP - 58

BT - Proceedings

A2 - RF Wolffenbuttel, null

A2 - DDL Wijngaards, null

A2 - CJ Mullem, van

PB - s.n.

CY - S.l.

T2 - Symposium on Microtechnology in Metrology and Metrology in Microsystems, Delft

Y2 - 31 August 2000 through 1 September 2000

ER -