Potential use of laser annealing in semiconductor processing [op CD-Rom verschenen]

LK Nanver, Q Ren, RJM Mallee, JHCM Slabbekoorn, GJ Bertens, EJG Goudena, MR van den Berg, H Schellevis, HW van Zeijl, TLM Scholtes, LCM van Oever

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationProceedings
Editors G Zweier
Place of PublicationS.l.
Publishers.n.
Pages214-221
Number of pages8
Publication statusPublished - 1999
EventEuropean Ion Implant User Seminar, Bad Aibling - S.l.
Duration: 22 Sep 199923 Sep 1999

Publication series

Name
PublisherS.n.

Conference

ConferenceEuropean Ion Implant User Seminar, Bad Aibling
Period22/09/9923/09/99

Keywords

  • Conf.proc. > 3 pag
  • ZX Int.klas.verslagjaar < 2002

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