Potential use of laser annealing in semiconductor processing [op CD-Rom verschenen]

LK Nanver; Q Ren; RJM Mallee; JHCM Slabbekoorn; GJ Bertens; EJG Goudena; MR van den Berg; H Schellevis; HW van Zeijl; TLM Scholtes; LCM van Oever

Potential use of laser annealing in semiconductor processing [op CD-Rom verschenen]

LK Nanver, Q Ren, RJM Mallee, JHCM Slabbekoorn, GJ Bertens, EJG Goudena, MR van den Berg, H Schellevis, HW van Zeijl, TLM Scholtes, LCM van Oever

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Proceedings
Editors	G Zweier
Place of Publication	S.l.
Publisher	s.n.
Pages	214-221
Number of pages	8
Publication status	Published - 1999
Event	European Ion Implant User Seminar, Bad Aibling - S.l. Duration: 22 Sept 1999 → 23 Sept 1999

Publication series

Name
Publisher	S.n.

Conference

Conference	European Ion Implant User Seminar, Bad Aibling
Period	22/09/99 → 23/09/99

Keywords

Conf.proc. > 3 pag
ZX Int.klas.verslagjaar < 2002

Cite this

@inproceedings{3effd4497fea4f089e1beb84ca621ef0,

title = "Potential use of laser annealing in semiconductor processing [op CD-Rom verschenen]",

keywords = "Conf.proc. > 3 pag, ZX Int.klas.verslagjaar < 2002",

author = "LK Nanver and Q Ren and RJM Mallee and JHCM Slabbekoorn and GJ Bertens and EJG Goudena and {van den Berg}, MR and H Schellevis and {van Zeijl}, HW and TLM Scholtes and {van Oever}, LCM",

year = "1999",

language = "Undefined/Unknown",

publisher = "s.n.",

pages = "214--221",

editor = "{G Zweier}",

booktitle = "Proceedings",

note = "European Ion Implant User Seminar, Bad Aibling ; Conference date: 22-09-1999 Through 23-09-1999",

}

TY - GEN

T1 - Potential use of laser annealing in semiconductor processing [op CD-Rom verschenen]

AU - Nanver, LK

AU - Ren, Q

AU - Mallee, RJM

AU - Slabbekoorn, JHCM

AU - Bertens, GJ

AU - Goudena, EJG

AU - van den Berg, MR

AU - Schellevis, H

AU - van Zeijl, HW

AU - Scholtes, TLM

AU - van Oever, LCM

PY - 1999

Y1 - 1999

KW - Conf.proc. > 3 pag

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SP - 214

EP - 221

BT - Proceedings

A2 - G Zweier, null

PB - s.n.

CY - S.l.

T2 - European Ion Implant User Seminar, Bad Aibling

Y2 - 22 September 1999 through 23 September 1999

ER -