Powder formation in germane-silane plasmas

RACMM Swaaij, BS Girwar, JW Metselaar

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)2116-2121
Number of pages6
JournalJournal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films
Volume18
Issue number5
Publication statusPublished - 2000

Keywords

  • ZX Int.klas.verslagjaar < 2002

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