Powder formation in germane-silane plasmas

RACMM Swaaij, BS Girwar, JW Metselaar

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	2116-2121
Number of pages	6
Journal	Journal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films
Volume	18
Issue number	5
Publication status	Published - 2000

Keywords

This output contributes to the following UN Sustainable Development Goals (SDGs)

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title = "Powder formation in germane-silane plasmas",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "RACMM Swaaij and BS Girwar and JW Metselaar",

year = "2000",

language = "Undefined/Unknown",

volume = "18",

pages = "2116--2121",

journal = "Journal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

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}

TY - JOUR

T1 - Powder formation in germane-silane plasmas

AU - Swaaij, RACMM

AU - Girwar, BS

AU - Metselaar, JW

PY - 2000

Y1 - 2000

KW - ZX Int.klas.verslagjaar < 2002

M3 - Article

SN - 0734-2101

VL - 18

SP - 2116

EP - 2121

JO - Journal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films

JF - Journal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films

IS - 5

ER -