@inproceedings{3e15c6d469464b76bb5987f8934121ef,
title = "Power Efficient V-Shape Electro-Thermal Actuator Using Constrained SU-8",
abstract = "This paper presents the design, simulation and characterization of a V-shape thermal actuator, which incorporates silicon/SU-8 composite. The design exploits the confined SU-8 layers in the composite for effective thermal actuation. The micro-fabricated actuator (1000-µm long, 56-µm wide, 60-µm high, 15 degrees bent) demonstrates a large in-plane motion (10 µm) at a 1.75-V driving voltage, consuming low power (16 mW) and operating at a relatively low temperature (125 degrees Centigrade). It is estimated to produce a blocked apex force of 100 mN at 1.75 V.",
keywords = "conference contrib. refereed, Conf.proc. > 3 pag",
author = "GK Lau and {Chu Duc}, T and JFL Goosen and PM Sarro and {van Keulen}, F",
year = "2007",
language = "Undefined/Unknown",
isbn = "1-4244-0842-3",
publisher = "IEEE",
pages = "287--290",
editor = "R Puers",
booktitle = "Technical Digest of the 14th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS'07)",
address = "United States",
note = "14th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS'07) ; Conference date: 10-06-2007 Through 17-06-2007",
}