Power Efficient V-Shape Electro-Thermal Actuator Using Constrained SU-8

GK Lau, T Chu Duc, JFL Goosen, PM Sarro, F van Keulen

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

9 Citations (Scopus)

Abstract

This paper presents the design, simulation and characterization of a V-shape thermal actuator, which incorporates silicon/SU-8 composite. The design exploits the confined SU-8 layers in the composite for effective thermal actuation. The micro-fabricated actuator (1000-µm long, 56-µm wide, 60-µm high, 15 degrees bent) demonstrates a large in-plane motion (10 µm) at a 1.75-V driving voltage, consuming low power (16 mW) and operating at a relatively low temperature (125 degrees Centigrade). It is estimated to produce a blocked apex force of 100 mN at 1.75 V.
Original languageUndefined/Unknown
Title of host publicationTechnical Digest of the 14th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS'07)
EditorsR Puers
Place of PublicationLyon, France
PublisherIEEE Society
Pages287-290
Number of pages4
ISBN (Print)1-4244-0842-3
Publication statusPublished - 2007
Event14th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS'07) - Lyon, France
Duration: 10 Jun 200717 Jun 2007

Publication series

Name
PublisherIEEE

Conference

Conference14th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS'07)
Period10/06/0717/06/07

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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