This paper presents the design, simulation and characterization of a V-shape thermal actuator, which incorporates silicon/SU-8 composite. The design exploits the confined SU-8 layers in the composite for effective thermal actuation. The micro-fabricated actuator (1000-µm long, 56-µm wide, 60-µm high, 15 degrees bent) demonstrates a large in-plane motion (10 µm) at a 1.75-V driving voltage, consuming low power (16 mW) and operating at a relatively low temperature (125 degrees Centigrade). It is estimated to produce a blocked apex force of 100 mN at 1.75 V.
|Conference||14th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS'07)|
|Period||10/06/07 → 17/06/07|
- conference contrib. refereed
- Conf.proc. > 3 pag