Practical considerations of the galvanic etch-stop for device applications

CMA Ashruf, PJ French, PM Sarro, W van der Vlist, EL Oemar, LJ Breems, JJ Kelly

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Transducers '99: digest of technical papers. Vol. 1
Place of Publication	Tokyo
Publisher	Institute of Electrical Engineers of Japan
Pages	560-563
Number of pages	4
Publication status	Published - 1999
Event	10th International Conference on Solid-State Sensors and Actuators, Sendai, Japan - Tokyo Duration: 7 Jun 1999 → 10 Jun 1999

Name
Publisher	Institute of Electrical Engineers of Japan

Conference	10th International Conference on Solid-State Sensors and Actuators, Sendai, Japan
Period	7/06/99 → 10/06/99

Keywords

@inproceedings{58776eca680541948d8e5d35ad5ca36f,

title = "Practical considerations of the galvanic etch-stop for device applications",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "CMA Ashruf and PJ French and PM Sarro and {van der Vlist}, W and EL Oemar and LJ Breems and JJ Kelly",

year = "1999",

language = "Undefined/Unknown",

publisher = "Institute of Electrical Engineers of Japan",

pages = "560--563",

booktitle = "Transducers '99: digest of technical papers. Vol. 1",

note = "10th International Conference on Solid-State Sensors and Actuators, Sendai, Japan ; Conference date: 07-06-1999 Through 10-06-1999",

}

Ashruf, CMA, French, PJ , Sarro, PM, van der Vlist, W, Oemar, EL, Breems, LJ & Kelly, JJ 1999, Practical considerations of the galvanic etch-stop for device applications. in Transducers '99: digest of technical papers. Vol. 1. Institute of Electrical Engineers of Japan, Tokyo, pp. 560-563, 10th International Conference on Solid-State Sensors and Actuators, Sendai, Japan, 7/06/99.

TY - GEN

T1 - Practical considerations of the galvanic etch-stop for device applications

AU - Ashruf, CMA

AU - French, PJ

AU - Sarro, PM

AU - van der Vlist, W

AU - Oemar, EL

AU - Breems, LJ

AU - Kelly, JJ

PY - 1999

Y1 - 1999

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SP - 560

EP - 563

BT - Transducers '99: digest of technical papers. Vol. 1

PB - Institute of Electrical Engineers of Japan

CY - Tokyo

T2 - 10th International Conference on Solid-State Sensors and Actuators, Sendai, Japan

Y2 - 7 June 1999 through 10 June 1999

ER -