Pre-charged collapse-mode capacitive micromachined ultrasonic transducer (CMUT) for broadband ultrasound power transfer

S. Kawasaki, Y. Westhoek, I. Subramaniam, M. Saccher, R. Dekker

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2 Citations (Scopus)
4 Downloads (Pure)

Abstract

Using ultrasound to power deeply implanted biomedical devices is a promising technique due to its low attenuation in body tissue and its short wavelength that allows precise focusing of the energy. Ultrasound energy harvesting conventionally has been done using lead zirconate titanate (PZT) ultrasound transducers, which uses the piezoelectric effect to convert mechanical vibration to an electrical voltage. However, PZT is typically bulky, and is not bio-compatible, and cannot be monolithically integrated with application-specific integrated circuits (ASIC). In this work, a pre-charged collapse-mode capacitive micromachined ultrasonic transducer (CMUT) was fabricated to harvest ultrasound energy. The pre-charged CMUT has a high power transfer efficiency over a wide bandwidth at optimal loading conditions; 43% at 2.15 MHz and 47% at 5.85 MHz. For the last 1.4 years, the device has been in collapse-mode, and it is still functional without any additional charging. This device will enable the development of smaller implantable biomedical devices in the future.
Original languageEnglish
Title of host publication2021 IEEE Wireless Power Transfer Conference (WPTC)
PublisherIEEE
Number of pages4
ISBN (Electronic)978-1-7281-9633-6
ISBN (Print)978-1-7281-9634-3
DOIs
Publication statusPublished - 2021
Event2021 IEEE Wireless Power Transfer Conference (WPTC) -
Duration: 1 Jun 20214 Jun 2021

Conference

Conference2021 IEEE Wireless Power Transfer Conference (WPTC)
Period1/06/214/06/21

Bibliographical note

Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Keywords

  • Capacitive micromachined ultrasonic transducer
  • Pre-charged CMUT
  • Ultrasound power transfer
  • Zero-bias transducers

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