Pre-charged collapse-mode capacitive micromachined ultrasonic transducer (CMUT) for broadband ultrasound power transfer

S. Kawasaki; Y. Westhoek; I. Subramaniam; M. Saccher; R. Dekker

doi:10.1109/WPTC51349.2021.9458104

Pre-charged collapse-mode capacitive micromachined ultrasonic transducer (CMUT) for broadband ultrasound power transfer

S. Kawasaki, Y. Westhoek, I. Subramaniam, M. Saccher, R. Dekker

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

3 Citations (Scopus)

143 Downloads (Pure)

Abstract

Using ultrasound to power deeply implanted biomedical devices is a promising technique due to its low attenuation in body tissue and its short wavelength that allows precise focusing of the energy. Ultrasound energy harvesting conventionally has been done using lead zirconate titanate (PZT) ultrasound transducers, which uses the piezoelectric effect to convert mechanical vibration to an electrical voltage. However, PZT is typically bulky, and is not bio-compatible, and cannot be monolithically integrated with application-specific integrated circuits (ASIC). In this work, a pre-charged collapse-mode capacitive micromachined ultrasonic transducer (CMUT) was fabricated to harvest ultrasound energy. The pre-charged CMUT has a high power transfer efficiency over a wide bandwidth at optimal loading conditions; 43% at 2.15 MHz and 47% at 5.85 MHz. For the last 1.4 years, the device has been in collapse-mode, and it is still functional without any additional charging. This device will enable the development of smaller implantable biomedical devices in the future.

Original language	English
Title of host publication	2021 IEEE Wireless Power Transfer Conference (WPTC)
Publisher	IEEE
Number of pages	4
ISBN (Electronic)	978-1-7281-9633-6
ISBN (Print)	978-1-7281-9634-3
DOIs	https://doi.org/10.1109/WPTC51349.2021.9458104
Publication status	Published - 2021
Event	2021 IEEE Wireless Power Transfer Conference (WPTC) - Duration: 1 Jun 2021 → 4 Jun 2021

Conference

Conference	2021 IEEE Wireless Power Transfer Conference (WPTC)
Period	1/06/21 → 4/06/21

Bibliographical note

Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Keywords

Capacitive micromachined ultrasonic transducer
Pre-charged CMUT
Ultrasound power transfer
Zero-bias transducers

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10.1109/WPTC51349.2021.9458104

Kawasaki_2021_Pre_charged_collapse_mode_capacitiv_1_Final published version, 1.05 MB

Cite this

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title = "Pre-charged collapse-mode capacitive micromachined ultrasonic transducer (CMUT) for broadband ultrasound power transfer",

abstract = "Using ultrasound to power deeply implanted biomedical devices is a promising technique due to its low attenuation in body tissue and its short wavelength that allows precise focusing of the energy. Ultrasound energy harvesting conventionally has been done using lead zirconate titanate (PZT) ultrasound transducers, which uses the piezoelectric effect to convert mechanical vibration to an electrical voltage. However, PZT is typically bulky, and is not bio-compatible, and cannot be monolithically integrated with application-specific integrated circuits (ASIC). In this work, a pre-charged collapse-mode capacitive micromachined ultrasonic transducer (CMUT) was fabricated to harvest ultrasound energy. The pre-charged CMUT has a high power transfer efficiency over a wide bandwidth at optimal loading conditions; 43% at 2.15 MHz and 47% at 5.85 MHz. For the last 1.4 years, the device has been in collapse-mode, and it is still functional without any additional charging. This device will enable the development of smaller implantable biomedical devices in the future.",

keywords = "Capacitive micromachined ultrasonic transducer, Pre-charged CMUT, Ultrasound power transfer, Zero-bias transducers",

author = "S. Kawasaki and Y. Westhoek and I. Subramaniam and M. Saccher and R. Dekker",

note = "Green Open Access added to TU Delft Institutional Repository {\textquoteleft}You share, we take care!{\textquoteright} – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public. ; 2021 IEEE Wireless Power Transfer Conference (WPTC) ; Conference date: 01-06-2021 Through 04-06-2021",

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doi = "10.1109/WPTC51349.2021.9458104",

language = "English",

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Kawasaki, S, Westhoek, Y, Subramaniam, I, Saccher, M & Dekker, R 2021, Pre-charged collapse-mode capacitive micromachined ultrasonic transducer (CMUT) for broadband ultrasound power transfer. in 2021 IEEE Wireless Power Transfer Conference (WPTC)., 9458104, IEEE, 2021 IEEE Wireless Power Transfer Conference (WPTC), 1/06/21. https://doi.org/10.1109/WPTC51349.2021.9458104

Pre-charged collapse-mode capacitive micromachined ultrasonic transducer (CMUT) for broadband ultrasound power transfer. / Kawasaki, S.; Westhoek, Y.; Subramaniam, I. et al.
2021 IEEE Wireless Power Transfer Conference (WPTC). IEEE, 2021. 9458104.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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AU - Subramaniam, I.

AU - Saccher, M.

AU - Dekker, R.

N1 - Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

PY - 2021

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N2 - Using ultrasound to power deeply implanted biomedical devices is a promising technique due to its low attenuation in body tissue and its short wavelength that allows precise focusing of the energy. Ultrasound energy harvesting conventionally has been done using lead zirconate titanate (PZT) ultrasound transducers, which uses the piezoelectric effect to convert mechanical vibration to an electrical voltage. However, PZT is typically bulky, and is not bio-compatible, and cannot be monolithically integrated with application-specific integrated circuits (ASIC). In this work, a pre-charged collapse-mode capacitive micromachined ultrasonic transducer (CMUT) was fabricated to harvest ultrasound energy. The pre-charged CMUT has a high power transfer efficiency over a wide bandwidth at optimal loading conditions; 43% at 2.15 MHz and 47% at 5.85 MHz. For the last 1.4 years, the device has been in collapse-mode, and it is still functional without any additional charging. This device will enable the development of smaller implantable biomedical devices in the future.

AB - Using ultrasound to power deeply implanted biomedical devices is a promising technique due to its low attenuation in body tissue and its short wavelength that allows precise focusing of the energy. Ultrasound energy harvesting conventionally has been done using lead zirconate titanate (PZT) ultrasound transducers, which uses the piezoelectric effect to convert mechanical vibration to an electrical voltage. However, PZT is typically bulky, and is not bio-compatible, and cannot be monolithically integrated with application-specific integrated circuits (ASIC). In this work, a pre-charged collapse-mode capacitive micromachined ultrasonic transducer (CMUT) was fabricated to harvest ultrasound energy. The pre-charged CMUT has a high power transfer efficiency over a wide bandwidth at optimal loading conditions; 43% at 2.15 MHz and 47% at 5.85 MHz. For the last 1.4 years, the device has been in collapse-mode, and it is still functional without any additional charging. This device will enable the development of smaller implantable biomedical devices in the future.

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KW - Zero-bias transducers

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M3 - Conference contribution

SN - 978-1-7281-9634-3

BT - 2021 IEEE Wireless Power Transfer Conference (WPTC)

PB - IEEE

T2 - 2021 IEEE Wireless Power Transfer Conference (WPTC)

Y2 - 1 June 2021 through 4 June 2021

ER -

Pre-charged collapse-mode capacitive micromachined ultrasonic transducer (CMUT) for broadband ultrasound power transfer

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Keywords

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