Pre-distorted sinewave-driven parallel-plate electrostatic actuator for harmonic displacement

G de Graaf, L Mol, LA Rocha, E Cretu, RF Wolffenbuttel

Research output: Contribution to journal › Article › Scientific › peer-review

2 Citations (Scopus)

Original language	Undefined/Unknown
Pages (from-to)	103-108
Number of pages	6
Journal	Journal of Micromechanics and Microengineering
Volume	15
DOIs	https://doi.org/doi:10.1088/0960-1317/15/7/015
Publication status	Published - 2005

Keywords

@article{49645bdd4ffa432295e538f2c9258dda,

title = "Pre-distorted sinewave-driven parallel-plate electrostatic actuator for harmonic displacement",

keywords = "Elektrotechniek, Techniek, academic journal papers, ZX CWTS 1.00 <= JFIS < 3.00",

author = "{de Graaf}, G and L Mol and LA Rocha and E Cretu and RF Wolffenbuttel",

year = "2005",

doi = "doi:10.1088/0960-1317/15/7/015",

language = "Undefined/Unknown",

volume = "15",

pages = "103--108",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing",

}

TY - JOUR

T1 - Pre-distorted sinewave-driven parallel-plate electrostatic actuator for harmonic displacement

AU - de Graaf, G

AU - Mol, L

AU - Rocha, LA

AU - Cretu, E

AU - Wolffenbuttel, RF

PY - 2005

Y1 - 2005

KW - Elektrotechniek

KW - Techniek

KW - academic journal papers

KW - ZX CWTS 1.00 <= JFIS < 3.00

U2 - doi:10.1088/0960-1317/15/7/015

DO - doi:10.1088/0960-1317/15/7/015

M3 - Article

SN - 0960-1317

VL - 15

SP - 103

EP - 108

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

ER -