Pre-Silicon direct Calibration/De-embedding Evaluation and Device Parameters Uncertainty Estimation

In this contribution we present a simulation test-bench capable of separating and quantifying all the major sources of uncertainties in user-designed direct calibration/de-embedding test-fixtures. The calibrated data systematic errors arising from the different response of the standard definitions when compared to their in-fixture ones as well as the random contributions arising from the instrument noise and probe (variable) misplacement are described and propagated through the calibration equations versus frequency. Finally, the S-parameter uncertainties are further propagated to the device level parameters, i.e., gate capacitance and transducer gain to provide the required link between calibration accuracy and modelling uncertainty. Preliminary measurement data in the 140GHz-220GHz range are compared versus the uncertainty model prediction.