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Dive into the research topics of 'Precision Recess of AlGaN/GaN with Controllable Etching Rate Using ICP-RIE Oxidation and Wet Etching'. Together they form a unique fingerprint.- Sort by
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R. Sokolovskij, J. Sun, Fabio Santagata, Elina Iervolino, S. Li, G.Y. Zhang, P. M. Sarro, G. Q. Zhang*
Research output: Contribution to journal › Conference article › Scientific › peer-review