Precursor utilization in atomic layer deposition on nanostructured materials in fluidized bed reactors

Research output: Contribution to conference › Abstract › Scientific

Original language	English
Pages	1-2
Number of pages	2
Publication status	Published - 2014
Event	2014 AIChE annual meeeting - Atlanta, USA Duration: 16 Nov 2014 → 21 Nov 2014

Conference	2014 AIChE annual meeeting
Period	16/11/14 → 21/11/14

Cite this

@conference{ec24b0d0befc4daeb8673d6bd03014ac,

title = "Precursor utilization in atomic layer deposition on nanostructured materials in fluidized bed reactors",

author = "F Grillo and MT Kreutzer and {van Ommen}, JR",

year = "2014",

language = "English",

pages = "1--2",

note = "2014 AIChE annual meeeting ; Conference date: 16-11-2014 Through 21-11-2014",

}

TY - CONF

T1 - Precursor utilization in atomic layer deposition on nanostructured materials in fluidized bed reactors

AU - Grillo, F

AU - Kreutzer, MT

AU - van Ommen, JR

PY - 2014

Y1 - 2014

UR - https://aiche.confex.com/aiche/2014/webprogram/Paper386017.html

M3 - Abstract

SP - 1

EP - 2

T2 - 2014 AIChE annual meeeting

Y2 - 16 November 2014 through 21 November 2014

ER -