@article{d503793c9230410482e2ebc4c14a9db4,
title = "Predicted effect of shot noise on contact hole dimension in e-beam lithography",
keywords = "academic journal papers, CWTS 0.75 <= JFIS < 2.00",
author = "P Kruit and S. Steenbrink and M.J.J. Wieland",
year = "2006",
language = "Undefined/Unknown",
volume = "B 24",
pages = "2931--2935",
journal = "Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures",
issn = "1071-1023",
publisher = "AVS Science and Technology Society",
number = "Nov/Dec",
}