Prediction of back-end process-induced wafer warpage and experimental verification

RBR van Silfhout, WD van Driel, Y Li, GQ Zhang, LJ Ernst

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

17 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publication52nd electronic components & technology conference 2002
Place of PublicationPiscataway
PublisherIEEE Society
Pages1182-1187
Number of pages6
ISBN (Print)0-7803-7430-4
Publication statusPublished - 2002
EventCongress, San Diego - Piscataway
Duration: 29 May 2002 → …

Publication series

Name
PublisherIEEE

Conference

ConferenceCongress, San Diego
Period29/05/02 → …

Keywords

  • Conf.proc. > 3 pag

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