Preparation of large, location-controlled Si grains by excimer laser crystallization of ¿-Si film sputtered at 100 °C

M He, EJJ Neihof, Y van Andel, H Schellevis, R Ishihara, JW Metselaar, CIM Beenakker

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publication2006 Spring Meeting Symposium Proceedings, MRS Proceedings Volume 910 Symposium A: Amorphous and Polycrystalline Thin-Film Silicon Science and Technology ¿ 2006
Editors s.n.
Place of PublicationSan Francisco (CA), USA
Publishers.l.
Pages-
Publication statusPublished - 2006
EventMRS Spring Meeting - San Francisco, USA
Duration: 17 Apr 200621 Apr 2006

Publication series

Name
Publishers.l.

Conference

ConferenceMRS Spring Meeting
Period17/04/0621/04/06

Keywords

  • Elektrotechniek
  • Techniek
  • conference contrib. refereed
  • Conf.proc. > 3 pag

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