@inproceedings{5242d7ca29054646b75e50568ea7f80a,
title = "Preparation of large, location-controlled Si grains by excimer laser crystallization of ¿-Si film sputtered at 100 °C",
keywords = "Elektrotechniek, Techniek, conference contrib. refereed, Conf.proc. > 3 pag",
author = "M He and EJJ Neihof and {van Andel}, Y and H Schellevis and R Ishihara and JW Metselaar and CIM Beenakker",
year = "2006",
language = "Undefined/Unknown",
publisher = "s.l.",
pages = "--",
editor = "s.n.",
booktitle = "2006 Spring Meeting Symposium Proceedings, MRS Proceedings Volume 910 Symposium A: Amorphous and Polycrystalline Thin-Film Silicon Science and Technology ¿ 2006",
note = "MRS Spring Meeting ; Conference date: 17-04-2006 Through 21-04-2006",
}