Preparation of large, location-controlled Si grains by excimer-laser crystallization of a-Si films sputtered at 100C

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Mater. Res. Soc. Proc.
Editors	HA Atwater, A Chu, S Wagner, Yamamoto, HA Zan
Place of Publication	s.l.
Publisher	s.n.
Pages	1-4
Number of pages	4
Publication status	Published - 2007

Name
Publisher	s.n.

Name
Volume	910

Keywords

@inproceedings{306393b586fe43f8a943988efc44462c,

title = "Preparation of large, location-controlled Si grains by excimer-laser crystallization of a-Si films sputtered at 100C",

keywords = "Elektrotechniek, Techniek, conference contrib. refereed, Conf.proc. > 3 pag",

author = "M He and R Ishihara and CIM Beenakker",

year = "2007",

language = "Undefined/Unknown",

publisher = "s.n.",

pages = "1--4",

editor = "HA Atwater and A Chu and S Wagner and Yamamoto and HA Zan",

booktitle = "Mater. Res. Soc. Proc.",

}

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Preparation of large, location-controlled Si grains by excimer-laser crystallization of a-Si films sputtered at 100C

AU - He, M

AU - Ishihara, R

AU - Beenakker, CIM

PY - 2007

Y1 - 2007

KW - Elektrotechniek

KW - Techniek

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SP - 1

EP - 4

BT - Mater. Res. Soc. Proc.

A2 - Atwater, HA

A2 - Chu, A

A2 - Wagner, S

A2 - Yamamoto, null

A2 - Zan, HA

PB - s.n.

CY - s.l.

ER -