Preparation of large poly-Si grains by excimer laser crystallization of sputtered a-Si film with processing temperature of 100 °C

M He, R Ishihara, EJJ Neihof, Y van Andel, H Schellevis, CIM Beenakker

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationDigest of Technical papers of AM-FPD 06
Editors s.n.
Place of PublicationKeio Plaza Hotel, Tokyo, Japan
Publishers.l.
Pages313-316
Number of pages4
Publication statusPublished - 2006
EventThirteenth International Workshop on Active-Matrix Flatpanel Displays and Devices -TFT Technologies and Related Materials- (AM-FPD '06) - Keio Plaza Hotel, Tokyo, Japan
Duration: 5 Jul 20067 Jul 2006

Publication series

Name
Publishers.l.

Conference

ConferenceThirteenth International Workshop on Active-Matrix Flatpanel Displays and Devices -TFT Technologies and Related Materials- (AM-FPD '06)
Period5/07/067/07/06

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

Cite this