@inproceedings{83edae51291841d490e78e9314e9c37f,
title = "Pressure sensor for harsh environments",
keywords = "Conf.proc. > 3 pag",
author = "L Pakula and H Yang and TMH Pham and PJ French and PM Sarro",
year = "2002",
language = "Undefined/Unknown",
isbn = "973-0-02472-3",
publisher = "Nat. Inst. for Res. and Development in Microtechnoplogies",
pages = "295--298",
booktitle = "MME'02 micromechanics Europe",
note = "13th micromechanics Europe workshop MME 2002, Sinaia, Romania ; Conference date: 06-10-2002 Through 08-10-2002",
}