Pressure sensor, sensor probe comprising a pressure sensor, medical apparatus comprising a sensor probe and a method of fabricating a sensor probe

R Dekker (Inventor)

Research output: Patent

Abstract

The invention relates to a pressure sensor comprising a flexible membrane deformable in response to a pressure, which covers a cavity (2) and which comprises a strain gauge (21) that produces signals corresponding to the deformation of the flexible membrane, wherein the flexible membrane is a flexible monolithic integrated circuit foil (10). In this way the semiconductor integrated circuit itself serves as the flexible membrane, leading to a less complex fabrication process.
Original languageEnglish
Patent numberWO 2009027897 A2
Priority date30/04/09
Publication statusPublished - 2009

Keywords

  • Geen VSNU-classificatie

Fingerprint Dive into the research topics of 'Pressure sensor, sensor probe comprising a pressure sensor, medical apparatus comprising a sensor probe and a method of fabricating a sensor probe'. Together they form a unique fingerprint.

Cite this