Pressure sensor, sensor probe comprising a pressure sensor, medical apparatus comprising a sensor probe and a method of fabricating a sensor probe

R Dekker

Pressure sensor, sensor probe comprising a pressure sensor, medical apparatus comprising a sensor probe and a method of fabricating a sensor probe

Electronic Components, Technology and Materials

Research output: Patent

Abstract

The invention relates to a pressure sensor comprising a flexible membrane deformable in response to a pressure, which covers a cavity (2) and which comprises a strain gauge (21) that produces signals corresponding to the deformation of the flexible membrane, wherein the flexible membrane is a flexible monolithic integrated circuit foil (10). In this way the semiconductor integrated circuit itself serves as the flexible membrane, leading to a less complex fabrication process.

Original language	English
Patent number	WO 2009027897 A2
Priority date	30/04/09
Publication status	Published - 2009

Bibliographical note

Applicant:R. Dekker, F. van der Graaf, JFM. Velthuis, TNO, JR. Haartsen, Koninklijke Philips Electronics N.V.

Keywords

Geen VSNU-classificatie

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title = "Pressure sensor, sensor probe comprising a pressure sensor, medical apparatus comprising a sensor probe and a method of fabricating a sensor probe",

abstract = "The invention relates to a pressure sensor comprising a flexible membrane deformable in response to a pressure, which covers a cavity (2) and which comprises a strain gauge (21) that produces signals corresponding to the deformation of the flexible membrane, wherein the flexible membrane is a flexible monolithic integrated circuit foil (10). In this way the semiconductor integrated circuit itself serves as the flexible membrane, leading to a less complex fabrication process.",

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author = "R Dekker",

note = "Applicant:R. Dekker, F. van der Graaf, JFM. Velthuis, TNO, JR. Haartsen, Koninklijke Philips Electronics N.V.; WO 2009027897 A2",

year = "2009",

language = "English",

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TY - PAT

T1 - Pressure sensor, sensor probe comprising a pressure sensor, medical apparatus comprising a sensor probe and a method of fabricating a sensor probe

AU - Dekker, R

N1 - Applicant:R. Dekker, F. van der Graaf, JFM. Velthuis, TNO, JR. Haartsen, Koninklijke Philips Electronics N.V.

PY - 2009

Y1 - 2009

N2 - The invention relates to a pressure sensor comprising a flexible membrane deformable in response to a pressure, which covers a cavity (2) and which comprises a strain gauge (21) that produces signals corresponding to the deformation of the flexible membrane, wherein the flexible membrane is a flexible monolithic integrated circuit foil (10). In this way the semiconductor integrated circuit itself serves as the flexible membrane, leading to a less complex fabrication process.

AB - The invention relates to a pressure sensor comprising a flexible membrane deformable in response to a pressure, which covers a cavity (2) and which comprises a strain gauge (21) that produces signals corresponding to the deformation of the flexible membrane, wherein the flexible membrane is a flexible monolithic integrated circuit foil (10). In this way the semiconductor integrated circuit itself serves as the flexible membrane, leading to a less complex fabrication process.

KW - Geen VSNU-classificatie

M3 - Patent

M1 - WO 2009027897 A2

ER -

Pressure sensor, sensor probe comprising a pressure sensor, medical apparatus comprising a sensor probe and a method of fabricating a sensor probe

Abstract

Bibliographical note

Keywords

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