@inproceedings{529854bd60bc4904aec5f6e088482d53,
title = "Process Control of Aluminum-Doped Silicon Deposited by Low-Temperature Material-Inversion Solid-Phase Epitaxy",
keywords = "conference contrib. refereed, Conf.proc. > 3 pag",
author = "Y Civale and LK Nanver and P Hadley",
year = "2006",
language = "Undefined/Unknown",
isbn = "90-73461-44-8",
publisher = "s.l.",
pages = "458--461",
editor = "s.n.",
booktitle = "Proceedings of 9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors",
note = "9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors ; Conference date: 23-11-2006 Through 24-11-2006",
}