Process for low temperature deposition of strain gauge materials based on chromium nitride thin films

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

4 Citations (Scopus)

Original language	English
Title of host publication	Proc. IEEE SENSORS 2011
Editors	E Lewis, T Kenny
Publisher	IEEE Society
Pages	226-229
Number of pages	4
ISBN (Print)	978-1-4244-9288-6
DOIs	https://doi.org/10.1109/ICSENS.2011.6127044
Publication status	Published - 2011
Event	IEEE Sensors 2011 Conference - Limerick, Ireland Duration: 28 Oct 2011 → 31 Oct 2011

Access to Document

@inproceedings{4f61a05e3394466198985aed7461d935,

title = "Process for low temperature deposition of strain gauge materials based on chromium nitride thin films",

author = "HA Mol and PM Sarro and H Schellevis",

year = "2011",

doi = "10.1109/ICSENS.2011.6127044",

language = "English",

isbn = "978-1-4244-9288-6",

pages = "226--229",

editor = "E Lewis and T Kenny",

booktitle = "Proc. IEEE SENSORS 2011",

publisher = "IEEE Society",

note = "IEEE Sensors 2011 Conference ; Conference date: 28-10-2011 Through 31-10-2011",

}

TY - GEN

T1 - Process for low temperature deposition of strain gauge materials based on chromium nitride thin films

AU - Mol, HA

AU - Sarro, PM

AU - Schellevis, H

PY - 2011

Y1 - 2011

U2 - 10.1109/ICSENS.2011.6127044

DO - 10.1109/ICSENS.2011.6127044

M3 - Conference contribution

SN - 978-1-4244-9288-6

SP - 226

EP - 229

BT - Proc. IEEE SENSORS 2011

A2 - Lewis, E

A2 - Kenny, T

PB - IEEE Society

T2 - IEEE Sensors 2011 Conference

Y2 - 28 October 2011 through 31 October 2011

ER -