Process simulation of laser crystallization and analysis of crystallization process of Si films

F Kimura; R Saito; S Tsukamoto; Y Hiroshima; M Dorfan; S Inoue; T Shimoda; R Ishihara; Y van Aandel

Process simulation of laser crystallization and analysis of crystallization process of Si films

F Kimura, R Saito, S Tsukamoto, Y Hiroshima, M Dorfan, S Inoue, T Shimoda, R Ishihara, Y van Aandel

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	IDW/AD '05 - Proceedings of the 12th international display workshops in conjunction with Asia display 2005
Editors	H Mimura
Place of Publication	s.l.
Publisher	IDW/AD
Pages	977-980
Number of pages	4
Publication status	Published - 2005
Event	IDW/AD '05, 12th International Display Workshops in conjunction with Asia Display 2005, Takamatsu, Japan - s.l. Duration: 6 Dec 2005 → 9 Dec 2005

Publication series

Name
Publisher	IDW/AD

Conference

Conference	IDW/AD '05, 12th International Display Workshops in conjunction with Asia Display 2005, Takamatsu, Japan
Period	6/12/05 → 9/12/05

Bibliographical note

ISBN onbekend, WPM

Keywords

Elektrotechniek
Techniek
conference contrib. refereed
Conf.proc. > 3 pag

Cite this

Kimura, F., Saito, R., Tsukamoto, S., Hiroshima, Y., Dorfan, M., Inoue, S., Shimoda, T., Ishihara, R., & van Aandel, Y. (2005). Process simulation of laser crystallization and analysis of crystallization process of Si films. In H. Mimura (Ed.), IDW/AD '05 - Proceedings of the 12th international display workshops in conjunction with Asia display 2005 (pp. 977-980). IDW/AD.

@inproceedings{9d47be97132e42549a59044629e07c70,

title = "Process simulation of laser crystallization and analysis of crystallization process of Si films",

keywords = "Elektrotechniek, Techniek, conference contrib. refereed, Conf.proc. > 3 pag",

author = "F Kimura and R Saito and S Tsukamoto and Y Hiroshima and M Dorfan and S Inoue and T Shimoda and R Ishihara and {van Aandel}, Y",

note = "ISBN onbekend, WPM; IDW/AD '05, 12th International Display Workshops in conjunction with Asia Display 2005, Takamatsu, Japan ; Conference date: 06-12-2005 Through 09-12-2005",

year = "2005",

language = "Undefined/Unknown",

publisher = "IDW/AD",

pages = "977--980",

editor = "H Mimura",

booktitle = "IDW/AD '05 - Proceedings of the 12th international display workshops in conjunction with Asia display 2005",

}

Kimura, F, Saito, R, Tsukamoto, S, Hiroshima, Y, Dorfan, M, Inoue, S, Shimoda, T, Ishihara, R & van Aandel, Y 2005, Process simulation of laser crystallization and analysis of crystallization process of Si films. in H Mimura (ed.), IDW/AD '05 - Proceedings of the 12th international display workshops in conjunction with Asia display 2005. IDW/AD, s.l., pp. 977-980, IDW/AD '05, 12th International Display Workshops in conjunction with Asia Display 2005, Takamatsu, Japan, 6/12/05.

Process simulation of laser crystallization and analysis of crystallization process of Si films. / Kimura, F; Saito, R; Tsukamoto, S et al.
IDW/AD '05 - Proceedings of the 12th international display workshops in conjunction with Asia display 2005. ed. / H Mimura. s.l.: IDW/AD, 2005. p. 977-980.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Process simulation of laser crystallization and analysis of crystallization process of Si films

AU - Kimura, F

AU - Saito, R

AU - Tsukamoto, S

AU - Hiroshima, Y

AU - Dorfan, M

AU - Inoue, S

AU - Shimoda, T

AU - Ishihara, R

AU - van Aandel, Y

N1 - ISBN onbekend, WPM

PY - 2005

Y1 - 2005

KW - Elektrotechniek

KW - Techniek

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SP - 977

EP - 980

BT - IDW/AD '05 - Proceedings of the 12th international display workshops in conjunction with Asia display 2005

A2 - Mimura, H

PB - IDW/AD

CY - s.l.

T2 - IDW/AD '05, 12th International Display Workshops in conjunction with Asia Display 2005, Takamatsu, Japan

Y2 - 6 December 2005 through 9 December 2005

ER -