@inproceedings{c13529bca25345dcac910dc2b389e4e1,
title = "Process technology of high-aspect-ratio silicon beams for stretchable silicon electronics",
keywords = "Elektrotechniek, Techniek, conference contrib. refereed, Conf.proc. > 3 pag",
author = "T Zoumpoulidis and J Tian and S Sosin and M Bartek and L Wang and KMB Jansen and LJ Ernst and R Dekker and {de Graaf}, P",
year = "2008",
language = "Undefined/Unknown",
isbn = "978-1-4244-2118-3",
publisher = "IEEE Society",
pages = "361--366",
editor = "T Yang and T Kheng",
booktitle = "Proc. 10th electronics packaging technology conference (EPTC 2008)",
note = "EPTC 2008, Singapore ; Conference date: 09-12-2008 Through 12-12-2008",
}