Process technology of high-aspect-ratio silicon beams for stretchable silicon electronics

T Zoumpoulidis, J Tian, S Sosin, M Bartek, L Wang, KMB Jansen, LJ Ernst, R Dekker, P de Graaf

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

1 Citation (Scopus)
Original languageUndefined/Unknown
Title of host publicationProc. 10th electronics packaging technology conference (EPTC 2008)
EditorsT Yang, T Kheng
Place of PublicationPiscataway, ingapore
PublisherIEEE Society
Pages361-366
Number of pages6
ISBN (Print)978-1-4244-2118-3
Publication statusPublished - 2008
EventEPTC 2008, Singapore - Singapore
Duration: 9 Dec 200812 Dec 2008

Publication series

Name
PublisherIEEE

Conference

ConferenceEPTC 2008, Singapore
Period9/12/0812/12/08

Keywords

  • Elektrotechniek
  • Techniek
  • conference contrib. refereed
  • Conf.proc. > 3 pag

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