Processing of inertial sensors using SF6-O2 Cryogenic plasma process

G Craciun, H Yang, L Pakula, MA Blauw

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationSAFE 2003 Semiconductor advances for future electronics
Editors s.n.
Place of PublicationUtrecht
PublisherStichting voor de Technische Wetenschappen
Pages683-686
Number of pages4
ISBN (Print)90-73461-39-1
Publication statusPublished - 2003
EventSemiconductor advances for future electronics, Veldhoven, The Netherlands - Utrecht
Duration: 25 Nov 200326 Nov 2003

Publication series

Name
PublisherStichting voor de Technische Wetenschappen

Conference

ConferenceSemiconductor advances for future electronics, Veldhoven, The Netherlands
Period25/11/0326/11/03

Keywords

  • Vakpubl., Overig wet. > 3 pag

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