@inproceedings{07d65e1ef56742559e076f1969aeb50c,
title = "Processing of inertial sensors using SF6-O2 Cryogenic plasma process",
keywords = "Vakpubl., Overig wet. > 3 pag",
author = "G Craciun and H Yang and L Pakula and MA Blauw",
note = "CD-ROM; Semiconductor advances for future electronics, Veldhoven, The Netherlands ; Conference date: 25-11-2003 Through 26-11-2003",
year = "2003",
language = "Undefined/Unknown",
isbn = "90-73461-39-1",
publisher = "Stichting voor de Technische Wetenschappen",
pages = "683--686",
editor = "s.n.",
booktitle = "SAFE 2003 Semiconductor advances for future electronics",
}