@inproceedings{a6dc47f2a24940e68fb8f293bfd4f72a,
title = "Profile Engineering of Decreasing Arsenic Doping in Silicon RPCVD",
keywords = "conference contrib. refereed, Conf.proc. > 3 pag",
author = "M Popadic and F Sarubbi and TLM Scholtes and S Milosavljevic and {De Boer}, WB and LK Nanver",
year = "2006",
language = "Undefined/Unknown",
isbn = "90-73461-44-8",
publisher = "s.l.",
pages = "475--478",
editor = "s.n",
booktitle = "Proceedings of 9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors",
note = "9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors ; Conference date: 23-11-2006 Through 24-11-2006",
}