Profile Engineering of Decreasing Arsenic Doping in Silicon RPCVD

M Popadic, F Sarubbi, TLM Scholtes, S Milosavljevic, W de Boer, LK Nanver

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationSAFE 2007 Semiconductor advances for future electornics
Editors s.n.
Place of Publications.l.
PublisherSTW
Pages1-4
Number of pages4
Publication statusPublished - 2007

Publication series

Name
PublisherSTW

Keywords

  • conference contrib. refereed
  • Vakpubl., Overig wet. > 3 pag

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