Profiled poly-silicon films by hot-wire CVD for solar cells on cheap metal substrate.

JK Rath, FD Tichelaar, REI Schropp

Research output: Contribution to journal › Article › Scientific › peer-review

Cite this

@article{f4f8b1b83f32446a9afd82f79905fd64,

title = "Profiled poly-silicon films by hot-wire CVD for solar cells on cheap metal substrate.",

author = "JK Rath and FD Tichelaar and REI Schropp",

year = "1999",

language = "Undefined/Unknown",

volume = "67",

pages = "465--470",

journal = "Solid State Phenomena",

issn = "1012-0394",

publisher = "Trans Tech Publications",

}