Projection lens arrangement

JJ Wieland (Inventor), BJ Kampherbeek (Inventor), AHV van Veen (Inventor), P Kruit (Inventor), SWHK Steenbrink (Inventor)

Research output: Patent

Original languageFrench
Patent numberEP 2279515 B1
IPCH01L, B82Y, H01J, G03F, G01J, G21K
Priority date28/02/08
Publication statusPublished - 2011

Keywords

  • Octrooi
  • Projection Lens arrangement

    Wieland, MJJ., Kampherbeek, BJ., van Veen, A. H., Kruit, P. & Steenbrink, S. W. H. K., 2009, IPC No. H01L, B82Y, H01J, G03F, G01J, G21K, Priority date 28 Feb 2008, Priority No. WO 2009106397 A1

    Research output: Patent

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