Properties of antenna coupled microbolometers on thin Si3N4 membranes for the detection of THz radiation.

F Ghianni, TO Klaassen, WT Wenckebach

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Paper no. STW 1999 10 19-01:026

Cite this

@inproceedings{b12ad2bd9d6d47469c24da31ed946862,

title = "Properties of antenna coupled microbolometers on thin Si3N4 membranes for the detection of THz radiation.",

author = "F Ghianni and TO Klaassen and WT Wenckebach",

note = "Paper no. STW 1999 10 19-01:026",

year = "1999",

language = "Undefined/Unknown",

isbn = "90-73461-18-9",

pages = "167--172",

booktitle = "Proceedings of SAFE/CSSP'99.",

}