Properties of antenna coupled microbolometers on thin Si3N4 membranes for the detection of THz radiation.

F Ghianni, TO Klaassen, WT Wenckebach

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

    Original languageUndefined/Unknown
    Title of host publicationProceedings of SAFE/CSSP'99.
    Pages167-172
    Number of pages6
    Publication statusPublished - 1999

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