Properties of semiconductor surfaces covered with very thin insulating overlayers prepared by impacts of low-energy particles

E Pincik; H Gleskova; J Mullerova; V Nadazdy; S Marz; L Ortega; M Jergel; C Falcony; R Brunner; K Gmucova; M Zeman; RACMM Swaaij; M Kucera; R Jurani; M Zahoran

Properties of semiconductor surfaces covered with very thin insulating overlayers prepared by impacts of low-energy particles

E Pincik, H Gleskova, J Mullerova, V Nadazdy, S Marz, L Ortega, M Jergel, C Falcony, R Brunner, K Gmucova, M Zeman, RACMM Swaaij, M Kucera, R Jurani, M Zahoran

Electronic Components, Technology and Materials

Research output: Contribution to journal › Article › Scientific › peer-review

4 Citations (Scopus)

Original language	Undefined/Unknown
Pages (from-to)	131-141
Number of pages	11
Journal	Vacuum: surface engineering, surface instrumentation & vacuum technology
Volume	67
Publication status	Published - 2002

Keywords

Elektrotechniek
Techniek
ZX CWTS JFIS < 1.00

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Cite this

Pincik, E., Gleskova, H., Mullerova, J., Nadazdy, V., Marz, S., Ortega, L., Jergel, M., Falcony, C., Brunner, R., Gmucova, K., Zeman, M., Swaaij, RACMM., Kucera, M., Jurani, R., & Zahoran, M. (2002). Properties of semiconductor surfaces covered with very thin insulating overlayers prepared by impacts of low-energy particles. Vacuum: surface engineering, surface instrumentation & vacuum technology, 67, 131-141.

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title = "Properties of semiconductor surfaces covered with very thin insulating overlayers prepared by impacts of low-energy particles",

keywords = "Elektrotechniek, Techniek, ZX CWTS JFIS < 1.00",

author = "E Pincik and H Gleskova and J Mullerova and V Nadazdy and S Marz and L Ortega and M Jergel and C Falcony and R Brunner and K Gmucova and M Zeman and RACMM Swaaij and M Kucera and R Jurani and M Zahoran",

year = "2002",

language = "Undefined/Unknown",

volume = "67",

pages = "131--141",

journal = "Vacuum: surface engineering, surface instrumentation & vacuum technology",

issn = "0042-207X",

publisher = "Elsevier",

}

Pincik, E, Gleskova, H, Mullerova, J, Nadazdy, V, Marz, S, Ortega, L, Jergel, M, Falcony, C, Brunner, R, Gmucova, K, Zeman, M , Swaaij, RACMM, Kucera, M, Jurani, R & Zahoran, M 2002, 'Properties of semiconductor surfaces covered with very thin insulating overlayers prepared by impacts of low-energy particles', Vacuum: surface engineering, surface instrumentation & vacuum technology, vol. 67, pp. 131-141.

TY - JOUR

T1 - Properties of semiconductor surfaces covered with very thin insulating overlayers prepared by impacts of low-energy particles

AU - Pincik, E

AU - Gleskova, H

AU - Mullerova, J

AU - Nadazdy, V

AU - Marz, S

AU - Ortega, L

AU - Jergel, M

AU - Falcony, C

AU - Brunner, R

AU - Gmucova, K

AU - Zeman, M

AU - Swaaij, RACMM

AU - Kucera, M

AU - Jurani, R

AU - Zahoran, M

PY - 2002

Y1 - 2002

KW - Elektrotechniek

KW - Techniek

KW - ZX CWTS JFIS < 1.00

M3 - Article

SN - 0042-207X

VL - 67

SP - 131

EP - 141

JO - Vacuum: surface engineering, surface instrumentation & vacuum technology

JF - Vacuum: surface engineering, surface instrumentation & vacuum technology

ER -