Properties of semiconductor surfaces covered with very thin insulating overlayers prepared by impacts of low-energy particles

E Pincik, H Gleskova, J Mullerova, V Nadazdy, S Marz, L Ortega, M Jergel, C Falcony, R Brunner, K Gmucova, M Zeman, RACMM Swaaij, M Kucera, R Jurani, M Zahoran

Research output: Contribution to journalArticleScientificpeer-review

4 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)131-141
Number of pages11
JournalVacuum: surface engineering, surface instrumentation & vacuum technology
Publication statusPublished - 2002


  • Elektrotechniek
  • Techniek
  • ZX CWTS JFIS < 1.00

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