Property of single-crystalline Si TFTs fabricated with µ-Czochralski (Grain Filter) process

R Ishihara, PC van der Wilt, BD van Dijk, JW Metselaar, CIM Beenakker

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

12 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationPoly-silicon thin film transistor technology and applications in displays and other novel technology areas
EditorsAT Voutsas
PublisherSPIE
Pages10-19
Number of pages10
Publication statusPublished - 2003

Publication series

Name
PublisherSPIE-IS&T
NameProceedings of SPIE- International Society for Optical Engineering
Volume5004
ISSN (Print)0277-786X

Keywords

  • Conf.proc. > 3 pag

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