Proportional Microvalve Using A Piezoelectric Unimorph Microactuator

Arun Gunda, Gürhan Özkayar, Marcel Tichem, Murali Ghatkesar

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

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Abstract

Microvalves are important flow-control components in many standalone and integrated microfluidic circuits. Although there is a large body of work regarding
microvalves, there is still a need for an easyto-fabricate, small-footprint, low-power device that can control both liquids and gases at moderate pressures. This paper details the development of a piezoelectric microvalve compatible with both liquids and gases with a maximum driving pressure of 1 bar. A novel combination of accessible methods like 3D-printing and lasercutting has been used to realize this device. The device has a flow range of 0 - 90 μL min−1 at 1 bar inlet pressure. When fully closed, a leakage of 0.8% open-flow was measured with a power consumption of 37.5 μW.
Original languageEnglish
Title of host publicationProceedings of the 4th International Conference on MicroFluidic Handling Systems (MFHS 2019)
EditorsDennis Alveringh
Place of PublicationEnschede, The Netherlands
PublisherTwente University
Pages45-48
Publication statusPublished - 2019
EventMFHS 2019: 4th International Conference on MicroFluidic Handling Systems - Enschede, Netherlands
Duration: 2 Oct 20194 Oct 2019

Conference

ConferenceMFHS 2019: 4th International Conference on MicroFluidic Handling Systems
CountryNetherlands
CityEnschede
Period2/10/194/10/19

Keywords

  • microvalve
  • proportional
  • piezoelectric
  • 3D-printing
  • unimorph

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