Abstract
Microvalves are important flow-control components in many standalone and integrated microfluidic circuits. Although there is a large body of work regarding
microvalves, there is still a need for an easyto-fabricate, small-footprint, low-power device that can control both liquids and gases at moderate pressures. This paper details the development of a piezoelectric microvalve compatible with both liquids and gases with a maximum driving pressure of 1 bar. A novel combination of accessible methods like 3D-printing and lasercutting has been used to realize this device. The device has a flow range of 0 - 90 μL min−1 at 1 bar inlet pressure. When fully closed, a leakage of 0.8% open-flow was measured with a power consumption of 37.5 μW.
microvalves, there is still a need for an easyto-fabricate, small-footprint, low-power device that can control both liquids and gases at moderate pressures. This paper details the development of a piezoelectric microvalve compatible with both liquids and gases with a maximum driving pressure of 1 bar. A novel combination of accessible methods like 3D-printing and lasercutting has been used to realize this device. The device has a flow range of 0 - 90 μL min−1 at 1 bar inlet pressure. When fully closed, a leakage of 0.8% open-flow was measured with a power consumption of 37.5 μW.
Original language | English |
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Title of host publication | Proceedings of the 4th International Conference on MicroFluidic Handling Systems (MFHS 2019) |
Editors | Dennis Alveringh |
Place of Publication | Enschede, The Netherlands |
Publisher | Twente University |
Pages | 45-48 |
Publication status | Published - 2019 |
Event | MFHS 2019: 4th International Conference on MicroFluidic Handling Systems - Enschede, Netherlands Duration: 2 Oct 2019 → 4 Oct 2019 |
Conference
Conference | MFHS 2019: 4th International Conference on MicroFluidic Handling Systems |
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Country/Territory | Netherlands |
City | Enschede |
Period | 2/10/19 → 4/10/19 |
Keywords
- microvalve
- proportional
- piezoelectric
- 3D-printing
- unimorph