Protrusion formation and surface porosity development on thermally annealed helium implanted copper

R Escobar Galindo, A van Veen, JH Evans, H Schut, ThM Hosson

    Research output: Contribution to journalArticleScientificpeer-review

    27 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)262-275
    Number of pages14
    JournalNuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
    Volume217
    Publication statusPublished - 2004

    Keywords

    • ZX CWTS JFIS < 1.00

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