Protrusion formation and surface porosity development on thermally annealed helium implanted copper

R Escobar Galindo, A van Veen, JH Evans, H Schut, ThM Hosson

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	262-275
Number of pages	14
Journal	Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Volume	217
Publication status	Published - 2004

Keywords

@article{f92e4998a32e4fa2a8af91a1f7c056e1,

title = "Protrusion formation and surface porosity development on thermally annealed helium implanted copper",

keywords = "ZX CWTS JFIS < 1.00",

author = "{Escobar Galindo}, R and {van Veen}, A and JH Evans and H Schut and ThM Hosson",

year = "2004",

language = "Undefined/Unknown",

volume = "217",

pages = "262--275",

journal = "Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier",

}

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - Protrusion formation and surface porosity development on thermally annealed helium implanted copper

AU - Escobar Galindo, R

AU - van Veen, A

AU - Evans, JH

AU - Schut, H

AU - Hosson, ThM

PY - 2004

Y1 - 2004

KW - ZX CWTS JFIS < 1.00

M3 - Article

SN - 0168-583X

VL - 217

SP - 262

EP - 275

JO - Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

ER -