Proximity effect in ion-beam-induced deposition of nanopillars

P Chen, HWM Salemink, PFA Alkemade

Research output: Contribution to journalArticleScientificpeer-review

10 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)1838-1843
Number of pages6
JournalJournal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
VolumeB27
Issue number4
Publication statusPublished - 2009

Keywords

  • academic journal papers
  • CWTS JFIS < 0.75

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