Ptychography with multiple wavelength illumination

Xukang Wei, Paul Urbach

Research output: Contribution to journalArticleScientificpeer-review

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Abstract

For performing phase retrieval in the extreme ultraviolet (EUV) regime more efficiently, developing polychromatic ptychography is desirable. As an alternative to the existing ptychographic information multiplexing (PIM) method, we present an another scheme where all monochromatic exit waves are expressed in terms of the amplitude of the transmission function and the thickness function of the object. Our proposed algorithm is a gradient based method and its validity is studied numerically. In addition, the sampling issue which appears in the polychromatic ptychography scheme and its influence to the reconstruction quality are discussed.

Original languageEnglish
Pages (from-to)36767-36789
JournalOptics Express
Volume27
Issue number25
DOIs
Publication statusPublished - 2019

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