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Ptychography with multiple wavelength illumination

Xukang Wei*, Paul Urbach

*Corresponding author for this work

    Research output: Contribution to journalArticleScientificpeer-review

    198 Downloads (Pure)

    Abstract

    For performing phase retrieval in the extreme ultraviolet (EUV) regime more efficiently, developing polychromatic ptychography is desirable. As an alternative to the existing ptychographic information multiplexing (PIM) method, we present an another scheme where all monochromatic exit waves are expressed in terms of the amplitude of the transmission function and the thickness function of the object. Our proposed algorithm is a gradient based method and its validity is studied numerically. In addition, the sampling issue which appears in the polychromatic ptychography scheme and its influence to the reconstruction quality are discussed.

    Original languageEnglish
    Pages (from-to)36767-36789
    JournalOptics Express
    Volume27
    Issue number25
    DOIs
    Publication statusPublished - 2019

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