Pure boron-doped photodiodes: a solution for radiation detection in EUV lithography

F Sarubbi, LK Nanver, TLM Scholtes, S Nihtianov, F Scholze

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

34 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationIEEE 38th european solid-state device research conference
EditorsS Hall
Place of Publications.l.
PublisherIEEE Society
Pages278-281
Number of pages4
ISBN (Print)978-1-4244-2363-7
Publication statusPublished - 2008
EventESSDERC 2008, Edinburgh, Schotland, UK - s.l.
Duration: 15 Sep 200819 Sep 2008

Publication series

Name
PublisherIEEE

Conference

ConferenceESSDERC 2008, Edinburgh, Schotland, UK
Period15/09/0819/09/08

Keywords

  • Elektrotechniek
  • Techniek
  • conference contrib. refereed
  • Conf.proc. > 3 pag

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