@inproceedings{8151eb6d3ab54b5fa17ddbcb8dc3ca66,
title = "Pure boron-doped photodiodes: a solution for radiation detection in EUV lithography",
keywords = "Elektrotechniek, Techniek, conference contrib. refereed, Conf.proc. > 3 pag",
author = "F Sarubbi and LK Nanver and TLM Scholtes and S Nihtianov and F Scholze",
year = "2008",
language = "Undefined/Unknown",
isbn = "978-1-4244-2363-7",
publisher = "IEEE",
pages = "278--281",
editor = "S Hall",
booktitle = "IEEE 38th european solid-state device research conference",
address = "United States",
note = "ESSDERC 2008, Edinburgh, Schotland, UK ; Conference date: 15-09-2008 Through 19-09-2008",
}