Pure dopant deposition of B and Ga for ultrashallow junctions in Si-based devices

LK Nanver, A Sammak, V Mohammadi, KRC Mok, L Qi, A Sakic, N Golshani, J Derakhshandeh, TLM Scholtes, WB De Boer

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

16 Citations (Scopus)
Original languageEnglish
Title of host publication27th Symposium on Microelectronics Technology and Devices
Pages25-33
Number of pages9
DOIs
Publication statusPublished - 2012

Publication series

Name
NameECS Transactions
Volume49
ISSN (Print)1938-5862

Keywords

  • Conf.proc. > 3 pag

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