@inproceedings{d29d0d6c882c41d9b84780e34bce4bba,
title = "PVD aluminium nitride as heat-spreader in IC technology",
keywords = "conference contrib. refereed, Vakpubl., Overig wet. > 3 pag",
author = "{la Spina}, L and H Schellevis and N Nenadovic and S Milosavljevic and WHA Wien and {van Herwaarden}, AW and LK Nanver",
note = "Editors onbekend, WPM/STW; STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005), Veldhoven, the Netherlands ; Conference date: 17-11-2005 Through 18-11-2005",
year = "2005",
language = "Undefined/Unknown",
isbn = "90-73461-50-2",
publisher = "STW",
pages = "113--116",
editor = "s.n.",
booktitle = "Proceedings of the STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005)",
}