PVD aluminium nitride as heat-spreader in IC technology

L la Spina; H Schellevis; N Nenadovic; S Milosavljevic; WHA Wien; AW van Herwaarden; LK Nanver

PVD aluminium nitride as heat-spreader in IC technology

L la Spina, H Schellevis, N Nenadovic, S Milosavljevic, WHA Wien, AW van Herwaarden, LK Nanver

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings of the STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005)
Editors	s.n.
Place of Publication	Utrecht, The Netherlands
Publisher	STW
Pages	113-116
Number of pages	4
ISBN (Print)	90-73461-50-2
Publication status	Published - 2005
Event	STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005), Veldhoven, the Netherlands - Utrecht Duration: 17 Nov 2005 → 18 Nov 2005

Publication series

Name
Publisher	STW

Conference

Conference	STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005), Veldhoven, the Netherlands
Period	17/11/05 → 18/11/05

Bibliographical note

Editors onbekend, WPM/STW

Keywords

conference contrib. refereed
Vakpubl., Overig wet. > 3 pag

Cite this

@inproceedings{d29d0d6c882c41d9b84780e34bce4bba,

title = "PVD aluminium nitride as heat-spreader in IC technology",

keywords = "conference contrib. refereed, Vakpubl., Overig wet. > 3 pag",

author = "{la Spina}, L and H Schellevis and N Nenadovic and S Milosavljevic and WHA Wien and {van Herwaarden}, AW and LK Nanver",

note = "Editors onbekend, WPM/STW; STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005), Veldhoven, the Netherlands ; Conference date: 17-11-2005 Through 18-11-2005",

year = "2005",

language = "Undefined/Unknown",

isbn = "90-73461-50-2",

publisher = "STW",

pages = "113--116",

editor = "s.n.",

booktitle = "Proceedings of the STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005)",

}

la Spina, L, Schellevis, H, Nenadovic, N, Milosavljevic, S, Wien, WHA, van Herwaarden, AW & Nanver, LK 2005, PVD aluminium nitride as heat-spreader in IC technology. in s.n. (ed.), Proceedings of the STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005). STW, Utrecht, The Netherlands, pp. 113-116, STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005), Veldhoven, the Netherlands, 17/11/05.

PVD aluminium nitride as heat-spreader in IC technology. / la Spina, L; Schellevis, H; Nenadovic, N et al.
Proceedings of the STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005). ed. / s.n. Utrecht, The Netherlands: STW, 2005. p. 113-116.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - PVD aluminium nitride as heat-spreader in IC technology

AU - la Spina, L

AU - Schellevis, H

AU - Nenadovic, N

AU - Milosavljevic, S

AU - Wien, WHA

AU - van Herwaarden, AW

AU - Nanver, LK

N1 - Editors onbekend, WPM/STW

PY - 2005

Y1 - 2005

KW - conference contrib. refereed

KW - Vakpubl., Overig wet. > 3 pag

M3 - Conference contribution

SN - 90-73461-50-2

SP - 113

EP - 116

BT - Proceedings of the STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005)

A2 - s.n., null

PB - STW

CY - Utrecht, The Netherlands

T2 - STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005), Veldhoven, the Netherlands

Y2 - 17 November 2005 through 18 November 2005

ER -