PVD aluminium nitride as heat-spreader in IC technology

L la Spina, H Schellevis, N Nenadovic, S Milosavljevic, WHA Wien, AW van Herwaarden, LK Nanver

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationProceedings of the STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005)
Editors s.n.
Place of PublicationUtrecht, The Netherlands
PublisherSTW
Pages113-116
Number of pages4
ISBN (Print)90-73461-50-2
Publication statusPublished - 2005
EventSTW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005), Veldhoven, the Netherlands - Utrecht
Duration: 17 Nov 200518 Nov 2005

Publication series

Name
PublisherSTW

Conference

ConferenceSTW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005), Veldhoven, the Netherlands
Period17/11/0518/11/05

Keywords

  • conference contrib. refereed
  • Vakpubl., Overig wet. > 3 pag

Cite this