PVD Aluminium Nitride as Heat Spreader in Silicon-On-Glass Technology

L La Spina, H Schellevis, N Nenadovic, LK Nanver

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

3 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationProceedings of IEEE International Conference on Microelectronics
Editors s.n.
Place of PublicationBelgrade, Serbia
PublisherElectron Device Society
Pages365-368
Number of pages4
ISBN (Print)1-4244-0116-x
Publication statusPublished - 2006
EventIEEE International Conference on Microelectronics - Belgrade, Serbia
Duration: 14 May 200617 May 2006

Publication series

Name
PublisherElectron Device Society
Name
Volume2

Conference

ConferenceIEEE International Conference on Microelectronics
Period14/05/0617/05/06

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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