@inproceedings{f65961907ad348e28b292bc1da71bc56,
title = "PVD Aluminium Nitride as Heat Spreader in Silicon-On-Glass Technology",
keywords = "conference contrib. refereed, Conf.proc. > 3 pag",
author = "{La Spina}, L and H Schellevis and N Nenadovic and LK Nanver",
year = "2006",
language = "Undefined/Unknown",
isbn = "1-4244-0116-x",
publisher = "Electron Device Society",
pages = "365--368",
editor = "s.n.",
booktitle = "Proceedings of IEEE International Conference on Microelectronics",
note = "IEEE International Conference on Microelectronics ; Conference date: 14-05-2006 Through 17-05-2006",
}