Quantitative analysis and decoupling of mass and stiffness effects in cantilever mass sensors

H Sadeghian Marnani, CK Yang, H Goosen, A Bossche, PJ French, F van Keulen

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

1 Citation (Scopus)

Abstract

Response of nanomechanical resonant mass sensors to adsorption does not only depend on the mass loading, but also on the adsorbate stiffness, adsorption induced surface stresses and location. It is therefore clear that with just resonance frequency measurement, decoupling the stiffness and the mass effects is difficult. A recent theory proposed using the electrostatic pull-in instability (EPI), in combination with the resonance frequency to decouple the aforementioned opposing effects, is presented hereof. In this paper, by performing experiments of adsorption on cantilevers, we 1) performed preliminary experiments on EPI stiffness measurement and show the stiffness effects of typical mass deposition, 2) show that EPI can be used in combination with the frequency measurements, to quantitatively analyze both the stiffness and the mass of the adsorbed material.
Original languageEnglish
Title of host publicationProceedings Sensors 2010
EditorsG Fedder et al
Place of PublicationPiscataway, NJ, USA
PublisherIEEE Society
Pages631-634
Number of pages4
Publication statusPublished - 2010
EventIEEE Sensors 2010 Conference: 9th Annual IEEE Conference on Sensors - Hilton Waikoloa Village, Waikoloa, HI, United States
Duration: 1 Nov 20104 Nov 2010
Conference number: 9
http://ewh.ieee.org/conf/sensors2010/

Publication series

Name
PublisherIEEE

Conference

ConferenceIEEE Sensors 2010 Conference
CountryUnited States
CityWaikoloa, HI
Period1/11/104/11/10
Internet address

Keywords

  • Conf.proc. > 3 pag

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