Quantitative analysis and decoupling of mass and stiffness effects in cantilever mass sensors

H Sadeghian Marnani; CK Yang; H Goosen; A Bossche; PJ French; F van Keulen

Quantitative analysis and decoupling of mass and stiffness effects in cantilever mass sensors

H Sadeghian Marnani, CK Yang, H Goosen, A Bossche, PJ French, F van Keulen

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

1 Citation (Scopus)

Abstract

Response of nanomechanical resonant mass sensors to adsorption does not only depend on the mass loading, but also on the adsorbate stiffness, adsorption induced surface stresses and location. It is therefore clear that with just resonance frequency measurement, decoupling the stiffness and the mass effects is difficult. A recent theory proposed using the electrostatic pull-in instability (EPI), in combination with the resonance frequency to decouple the aforementioned opposing effects, is presented hereof. In this paper, by performing experiments of adsorption on cantilevers, we 1) performed preliminary experiments on EPI stiffness measurement and show the stiffness effects of typical mass deposition, 2) show that EPI can be used in combination with the frequency measurements, to quantitatively analyze both the stiffness and the mass of the adsorbed material.

Original language	English
Title of host publication	Proceedings Sensors 2010
Editors	G Fedder et al
Place of Publication	Piscataway, NJ, USA
Publisher	IEEE Society
Pages	631-634
Number of pages	4
Publication status	Published - 2010
Event	IEEE Sensors 2010 Conference: 9th Annual IEEE Conference on Sensors - Hilton Waikoloa Village, Waikoloa, HI, United States Duration: 1 Nov 2010 → 4 Nov 2010 Conference number: 9 http://ewh.ieee.org/conf/sensors2010/

Publication series

Name
Publisher	IEEE

Conference

Conference	IEEE Sensors 2010 Conference
Country	United States
City	Waikoloa, HI
Period	1/11/10 → 4/11/10
Internet address	http://ewh.ieee.org/conf/sensors2010/

Keywords

Conf.proc. > 3 pag

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@inproceedings{57779642c87f4613b57a75dcdeb9898a,

title = "Quantitative analysis and decoupling of mass and stiffness effects in cantilever mass sensors",

abstract = "Response of nanomechanical resonant mass sensors to adsorption does not only depend on the mass loading, but also on the adsorbate stiffness, adsorption induced surface stresses and location. It is therefore clear that with just resonance frequency measurement, decoupling the stiffness and the mass effects is difficult. A recent theory proposed using the electrostatic pull-in instability (EPI), in combination with the resonance frequency to decouple the aforementioned opposing effects, is presented hereof. In this paper, by performing experiments of adsorption on cantilevers, we 1) performed preliminary experiments on EPI stiffness measurement and show the stiffness effects of typical mass deposition, 2) show that EPI can be used in combination with the frequency measurements, to quantitatively analyze both the stiffness and the mass of the adsorbed material.",

keywords = "Conf.proc. > 3 pag",

author = "{Sadeghian Marnani}, H and CK Yang and H Goosen and A Bossche and PJ French and {van Keulen}, F",

year = "2010",

language = "English",

publisher = "IEEE Society",

pages = "631--634",

editor = "{Fedder et al}, G",

booktitle = "Proceedings Sensors 2010",

note = "IEEE Sensors 2010 Conference : 9th Annual IEEE Conference on Sensors ; Conference date: 01-11-2010 Through 04-11-2010",

url = "http://ewh.ieee.org/conf/sensors2010/",

}

Quantitative analysis and decoupling of mass and stiffness effects in cantilever mass sensors. / Sadeghian Marnani, H; Yang, CK; Goosen, H; Bossche, A ; French, PJ ; van Keulen, F.

Proceedings Sensors 2010. ed. / G Fedder et al. Piscataway, NJ, USA : IEEE Society, 2010. p. 631-634.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Quantitative analysis and decoupling of mass and stiffness effects in cantilever mass sensors

AU - Sadeghian Marnani, H

AU - Yang, CK

AU - Goosen, H

AU - Bossche, A

AU - French, PJ

AU - van Keulen, F

N1 - Conference code: 9

PY - 2010

Y1 - 2010

N2 - Response of nanomechanical resonant mass sensors to adsorption does not only depend on the mass loading, but also on the adsorbate stiffness, adsorption induced surface stresses and location. It is therefore clear that with just resonance frequency measurement, decoupling the stiffness and the mass effects is difficult. A recent theory proposed using the electrostatic pull-in instability (EPI), in combination with the resonance frequency to decouple the aforementioned opposing effects, is presented hereof. In this paper, by performing experiments of adsorption on cantilevers, we 1) performed preliminary experiments on EPI stiffness measurement and show the stiffness effects of typical mass deposition, 2) show that EPI can be used in combination with the frequency measurements, to quantitatively analyze both the stiffness and the mass of the adsorbed material.

AB - Response of nanomechanical resonant mass sensors to adsorption does not only depend on the mass loading, but also on the adsorbate stiffness, adsorption induced surface stresses and location. It is therefore clear that with just resonance frequency measurement, decoupling the stiffness and the mass effects is difficult. A recent theory proposed using the electrostatic pull-in instability (EPI), in combination with the resonance frequency to decouple the aforementioned opposing effects, is presented hereof. In this paper, by performing experiments of adsorption on cantilevers, we 1) performed preliminary experiments on EPI stiffness measurement and show the stiffness effects of typical mass deposition, 2) show that EPI can be used in combination with the frequency measurements, to quantitatively analyze both the stiffness and the mass of the adsorbed material.

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SP - 631

EP - 634

BT - Proceedings Sensors 2010

A2 - Fedder et al, G

PB - IEEE Society

CY - Piscataway, NJ, USA

T2 - IEEE Sensors 2010 Conference

Y2 - 1 November 2010 through 4 November 2010

ER -