Quantitative surface characterization using a Normarki microscope.

OW Fähnle, S Debruyne, T Wons, RM van der Bijl, H van Brug, JJM Braat

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationOptical Fabrication and Testing
EditorsK Tatsuno
Number of pages3
Publication statusPublished - 2000

Bibliographical note

ODF2000; OSA Technical Digest series


  • ZX Int.klas.verslagjaar < 2002

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