Quantum Noise Effects in e-Beam Lithography and Metrology

Thomas Verduin

    Research output: ThesisDissertation (TU Delft)

    273 Downloads (Pure)
    Original languageEnglish
    Supervisors/Advisors
    • Kruit, P., Supervisor
    • Hagen, C.W., Advisor
    Award date18 Jan 2017
    Print ISBNs978-94-6186-782-7
    DOIs
    Publication statusPublished - 2017

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