Quartz to silicon fusion bonding or micro acoustic wave applications

PM Sarro, A Berthold

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationSensor technology in the Netherlands, state of the art: proceedings
Editorsvan den A Berg, P Bergveld
Place of PublicationDordrecht
PublisherKluwer
Pages213-216
Number of pages4
ISBN (Print)0-7923-5010-3
Publication statusPublished - 2000
EventDutch Sensor Conference, Enschede - Dordrecht
Duration: 2 Mar 19983 Mar 1998

Publication series

Name
PublisherKluwer

Conference

ConferenceDutch Sensor Conference, Enschede
Period2/03/983/03/98

Keywords

  • ZX Int.klas.verslagjaar < 2002

Cite this

Sarro, PM., & Berthold, A. (2000). Quartz to silicon fusion bonding or micro acoustic wave applications. In V. D. A Berg, & P Bergveld (Eds.), Sensor technology in the Netherlands, state of the art: proceedings (pp. 213-216). Kluwer.