Quartz to silicon fusion bonding or micro acoustic wave applications

PM Sarro, A Berthold

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Sensor technology in the Netherlands, state of the art: proceedings
Editors	van den A Berg, P Bergveld
Place of Publication	Dordrecht
Publisher	Kluwer
Pages	213-216
Number of pages	4
ISBN (Print)	0-7923-5010-3
Publication status	Published - 2000
Event	Dutch Sensor Conference, Enschede - Dordrecht Duration: 2 Mar 1998 → 3 Mar 1998

Name
Publisher	Kluwer

Conference	Dutch Sensor Conference, Enschede
Period	2/03/98 → 3/03/98

Keywords

@inproceedings{e0010194e6b54b4e9d042e317eb5ca7e,

title = "Quartz to silicon fusion bonding or micro acoustic wave applications",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "PM Sarro and A Berthold",

year = "2000",

language = "Undefined/Unknown",

isbn = "0-7923-5010-3",

publisher = "Kluwer",

pages = "213--216",

editor = "{A Berg}, {van den} and {P Bergveld}",

booktitle = "Sensor technology in the Netherlands, state of the art: proceedings",

note = "Dutch Sensor Conference, Enschede ; Conference date: 02-03-1998 Through 03-03-1998",

}

TY - GEN

T1 - Quartz to silicon fusion bonding or micro acoustic wave applications

AU - Sarro, PM

AU - Berthold, A

PY - 2000

Y1 - 2000

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 0-7923-5010-3

SP - 213

EP - 216

BT - Sensor technology in the Netherlands, state of the art: proceedings

A2 - A Berg, van den

A2 - P Bergveld, null

PB - Kluwer

CY - Dordrecht

T2 - Dutch Sensor Conference, Enschede

Y2 - 2 March 1998 through 3 March 1998

ER -