Quest for high brightness, monochromatic noble gas ion sources

VN Tondare

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	1498-1508
Number of pages	11
Journal	Journal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films
Volume	23
Issue number	6
Publication status	Published - 2005

Keywords

@article{056b3d45c3bc497a9f3b296af7186789,

title = "Quest for high brightness, monochromatic noble gas ion sources",

keywords = "ZX CWTS JFIS < 1.00",

author = "VN Tondare",

year = "2005",

language = "Undefined/Unknown",

volume = "23",

pages = "1498--1508",

journal = "Journal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "6",

}

TY - JOUR

T1 - Quest for high brightness, monochromatic noble gas ion sources

AU - Tondare, VN

PY - 2005

Y1 - 2005

KW - ZX CWTS JFIS < 1.00

M3 - Article

SN - 0734-2101

VL - 23

SP - 1498

EP - 1508

JO - Journal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films

JF - Journal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films

IS - 6

ER -