Quest for high brightness, monochromatic noble gas ion sources

VN Tondare

    Research output: Contribution to journalArticleScientificpeer-review

    92 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)1498-1508
    Number of pages11
    JournalJournal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films
    Volume23
    Issue number6
    Publication statusPublished - 2005

    Keywords

    • ZX CWTS JFIS < 1.00

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