RAdiation detector, method of manufacturing a radiation detector and lithographic apparatus comprising a radiation detector

S Nihtianov (Inventor), LK Nanver (Inventor), F Sarubbi (Inventor), TLM Scholtes (Inventor)

Research output: Patent

Keywords

@misc{1e20ea18c2c545adb00bf99b2a7d2655,

title = "RAdiation detector, method of manufacturing a radiation detector and lithographic apparatus comprising a radiation detector",

keywords = "other public output, Octrooi",

author = "S Nihtianov and LK Nanver and F Sarubbi and TLM Scholtes",

year = "2009",

language = "Undefined/Unknown",

type = "Patent",

note = "EP2009705 A2",

}