Radiation detector, method of manufacturing a radiation detector and lithographic apparatus comprising a radiation detector

S Nihtianov (Inventor), LK Nanver (Inventor), F Sarubbi (Inventor), TLM Scholtes (Inventor)

Research output: Patent

Original languageUndefined/Unknown
Patent numberUS 20080315121
Priority date25/12/08
Publication statusPublished - 2009

Keywords

  • other public output
  • Octrooi

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