Radical transport in deep silicon structures during dry etching.

MA Blauw, T Zijlstra, EWJM van der Drift

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Workshop on Semiconductor Sensor and Actuator Technology (Sesens)
Editors	JP Veen
Pages	617-622
Number of pages	6
Publication status	Published - 2000

CD-Rom

Keywords

@inproceedings{63eaa23fab5f4c46af57f009f584af9a,

title = "Radical transport in deep silicon structures during dry etching.",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "MA Blauw and T Zijlstra and {van der Drift}, EWJM",

note = "CD-Rom",

year = "2000",

language = "Undefined/Unknown",

isbn = "90-73461-24-3",

pages = "617--622",

editor = "JP Veen",

booktitle = "Workshop on Semiconductor Sensor and Actuator Technology (Sesens)",

}