Rapid manifacturing of low-noise membranes for nanopore sensors by trans-chip illumination lithograpy

XJA Janssen, PM Jonsson, C Plesa, GV Soni, C Dekker, NH Dekker

Research output: Contribution to journal › Article › Scientific › peer-review

doi 10.1088/09547-4484/23/47/475302

Cite this

@article{c886fc40155d4c3ab4bde9c0b0446a39,

title = "Rapid manifacturing of low-noise membranes for nanopore sensors by trans-chip illumination lithograpy",

author = "XJA Janssen and PM Jonsson and C Plesa and GV Soni and C Dekker and NH Dekker",

note = "doi 10.1088/09547-4484/23/47/475302",

year = "2012",

language = "Undefined/Unknown",

volume = "23",

pages = "75302--75309",

journal = "Nanotechnology",

issn = "0957-4484",

publisher = "IOP Publishing",

number = "47",

}

TY - JOUR

T1 - Rapid manifacturing of low-noise membranes for nanopore sensors by trans-chip illumination lithograpy

AU - Janssen, XJA

AU - Jonsson, PM

AU - Plesa, C

AU - Soni, GV

AU - Dekker, C

AU - Dekker, NH

N1 - doi 10.1088/09547-4484/23/47/475302

PY - 2012

Y1 - 2012

M3 - Article

SN - 0957-4484

VL - 23

SP - 75302

EP - 75309

JO - Nanotechnology

JF - Nanotechnology

IS - 47

ER -