@article{d590393ffc1d450fb0ba77f28803ff38,
title = "Reactive magnetron sputter-deposition of NbN and (Nb, Ti)N films related to sputtering source characterization and optimization.",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "N Iossad and BD Jackson and SN Polyakov and PN Dmitriev and TM Klapwijk",
year = "2001",
language = "Undefined/Unknown",
volume = "19",
pages = "1840--1845",
journal = "Journal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "4",
}