Reactive magnetron sputter-deposition of NbN and (Nb, Ti)N films related to sputtering source characterization and optimization.

N Iossad, BD Jackson, SN Polyakov, PN Dmitriev, TM Klapwijk

    Research output: Contribution to journalArticleScientificpeer-review

    9 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)1840-1845
    Number of pages6
    JournalJournal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films
    Volume19
    Issue number4
    Publication statusPublished - 2001

    Keywords

    • ZX Int.klas.verslagjaar < 2002

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